hal-00574748, version 1
A direct visual servoing scheme for automatic nanopositioning.
Brahim Tamadazte
1Nadine Le Fort - Piat
1Eric Marchand
2
IEEE-ASME Transactions on Mechatronics. (2011) 1-10
Résumé : This paper demonstrates an accurate nanopositioning scheme based on a direct visual servoing process. This technique uses only the pure image signal (photometric information) to design the visual servoing control law. With respect to traditional visual servoing approaches that use geometric visual features (points, lines ...), the visual features used in the control law is the pixel intensity. The proposed approach has been tested in term of accuracy and robustness in several experimental conditions. The obtained results have demonstrated a good behavior of the control law and very good positioning accuracy. The obtained accuracies are 89 nm, 14 nm, and 0.001 degrees in the x, y and axes of a positioning platform, respectively.
- 1 : Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (FEMTO-ST)
- CNRS : UMR6174 – Université de Franche-Comté – Université de Technologie de Belfort-Montbeliard – Ecole Nationale Supérieure de Mécanique et des Microtechniques
- 2 : LAGADIC (INRIA - IRISA)
- CNRS : UMR6074 – INRIA – Université de Rennes 1
- Domaine : Sciences de l'ingénieur/Micro et nanotechnologies/Microélectronique
- Mots-clés : Microrobotics – visual servoing – micromanipulation.
- hal-00574748, version 1
- http://hal.archives-ouvertes.fr/hal-00574748
- oai:hal.archives-ouvertes.fr:hal-00574748
- Contributeur : Martine Azema
- Soumis le : Mardi 8 Mars 2011, 16:36:44
- Dernière modification le : Mercredi 9 Mars 2011, 10:18:40






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