Growth of strained Ga1-xInxP layers on GaP (001) by gas source molecular beam epitaxy: similarities and differences with the growth of strained arsenides
Résumé
Using reflection high energy electron diffraction and atomic force microscopy, the growth of Ga1−xInxP alloys on GaP (0 0 1) with x varying from 0.2 to 1 (InP) is investigated and compared to that of arsenides on GaAs (0 0 1) or InP (0 0 1). At 520°C, the evolution of the critical thickness for 3D growth versus In content is rather similar to that observed in the GaInAs/GaAs system. For x⩽0.5, 3D growth leads to the development of wire-like structures along the [1 1 0] direction which can be related to recent results on the phosphide surface reconstructions. Finally, for the growth of InP on GaP at 520°C, the critical thickness is 2.1 MLs and we observe a small density of very large islands, in contrast to the InAs/GaAs case. At 400°C, the critical thickness decreases (1.7 MLs) as well as the island mean size whereas the density increases. We discuss this behavior in terms of surface energy.
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