Development of a Novel Process Chain Based on Atomic Force Microscopy Scratching for Small and Medium Series Production of Polymer Nanostructured Components

E.B. Brousseau 1 Florian Krobs 2 Emmanuel Cailaud 3, 4 Serge Dimov 1 Olivier Gibaru 5, 6, 4 Sergej Fatikow 2
3 S4 - System synthesis and supervision, scenarios
IRISA - Institut de Recherche en Informatique et Systèmes Aléatoires, Inria Rennes – Bretagne Atlantique
6 ALIEN - Algebra for Digital Identification and Estimation
Inria Lille - Nord Europe, Inria Saclay - Ile de France, Ecole Centrale de Lille, X - École polytechnique, CNRS - Centre National de la Recherche Scientifique : UMR8146
Abstract : The continuing trend for producing novel micro- and nanostructured devices and components in a broad range of materials is a major motivating factor driving the research in the micro- and nanomanufacturing sector toward developing innovative process chains. Some of such chains enable the serial production of micro- and nanostructured parts in polymer material by combining innovatively and optimizing simultaneously master making and replication technologies. For producing features at the nanoscale, the master making processes that are currently commonly employed rely on complex lithography-based pattern transfers and/or on beam-based direct write processes. Unfortunately, the required equipment to perform these techniques are often capital intensive and necessitate particular operating temperatures or vacuum conditions. At the same time, during the development phase of new or improved nanotechnology-enabled products, it is beneficial to produce rapidly polymer prototypes to test the functionality of components with nanoscale features. Thus, the technologies currently available for nanostructuring replication masters do not comply with the low cost equirements typically associated with the production of small batches of components for prototyping purposes. As a result, this could restrict the successful development of products with functional features at the nanoscale. In this research, a new process chain is presented for the fabrication of nanostructured components in polymer that relies on a simple and costeffective master making technology. In particular, atomic force microscopy scratching is employed as an alternative technique for nanostructuring replication masters for microinjection molding. The conducted experimental study demonstrated the potential of this approach for small and medium series production of nanostructured devices in thermoplastic materials. In addition, the effects of different scratching parameters on the achievable surface roughness and depth of the patterned structures were analyzed by employing the design of experiments approach.
Type de document :
Article dans une revue
Journal of Manufacturing Science and Engineering, American Society of Mechanical Engineers, 2010, 132 (3), 〈http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JMSEFK000132000003030901000001&idtype=cvips&gifs=yes&ref=no〉
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https://hal.inria.fr/hal-00777294
Contributeur : Olivier Gibaru <>
Soumis le : jeudi 17 janvier 2013 - 12:05:58
Dernière modification le : lundi 23 avril 2018 - 13:40:42

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E.B. Brousseau, Florian Krobs, Emmanuel Cailaud, Serge Dimov, Olivier Gibaru, et al.. Development of a Novel Process Chain Based on Atomic Force Microscopy Scratching for Small and Medium Series Production of Polymer Nanostructured Components. Journal of Manufacturing Science and Engineering, American Society of Mechanical Engineers, 2010, 132 (3), 〈http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JMSEFK000132000003030901000001&idtype=cvips&gifs=yes&ref=no〉. 〈hal-00777294〉

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