Self-Powered Conformable Deformation Sensor Exploiting the Collective Piezoelectric Effect of Self-Organised GaN Nanowires

Emmanuelle Pauliac-Vaujour 1 Sven Salomon 1 Joël Eymery 1 Edgar Leon Perez 1
1 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
Abstract : We present a novel integration-driven approach to the design of multi-scale multi-physics sensors and systems. We implement this method to model, design, fabricate and characterize a thin, conformable low-cost impact detection sensor based on assemblies of piezoelectric GaN nanowires. When suitably assembled, the latter demonstrate a macroscale additivity of their nanoscale intrinsic properties, which enables to appeal to classical fabrication techniques and exploitable electronic readouts at the system level. We also exploit multi-level simulations to provide useful insights of adapted application-driven integration solutions for these new forms of sensors. We demonstrate the potential of such application-targeted, fully-integrated and modular systems to accommodate to the stringent requirements of structural health monitoring (SHM).
Keywords : Piezoelectric sensors MEMS and nano agents Stress & strain
Type de document :
Communication dans un congrès
Le Cam, Vincent and Mevel, Laurent and Schoefs, Franck. EWSHM - 7th European Workshop on Structural Health Monitoring, Jul 2014, Nantes, France. 2014
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Emmanuelle Pauliac-Vaujour, Sven Salomon, Joël Eymery, Edgar Leon Perez. Self-Powered Conformable Deformation Sensor Exploiting the Collective Piezoelectric Effect of Self-Organised GaN Nanowires. Le Cam, Vincent and Mevel, Laurent and Schoefs, Franck. EWSHM - 7th European Workshop on Structural Health Monitoring, Jul 2014, Nantes, France. 2014. 〈hal-01022023〉

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