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High-Q Slow-Wave Coplanar Transmission Lines on 0.35 μm Process

Abstract : In this letter, experimental results and trends for shielded coplanar waveguide transmission lines (S-CPW) implemented in a 0.35 μm CMOS technology are provided. Because of the introduction of floating strips below the CPW transmission line, high effective dielectric permittivity and quality factor are obtained. Three different geometries of S-CPW transmission lines are characterized. For the best geometry, the measured effective dielectric permittivity reaches 48, leading to a very high slow-wave factor and high miniaturization. In addition, measurements demonstrate a quality factor ranging from 20 to 40 between 10 and 40 GHz, demonstrating state-of-the-art results for transmission lines realized in a low-cost CMOS standard technology.
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D. Kaddour, H. Issa, Anne-Laure Franc, Nicolas Corrao, Emmanuel Pistono, et al.. High-Q Slow-Wave Coplanar Transmission Lines on 0.35 μm Process. IEEE Microwave and Wireless Components Letters, Institute of Electrical and Electronics Engineers, 2009, 19 (9), pp.542-544. ⟨10.1109/lmwc.2009.2027053⟩. ⟨hal-01023128⟩



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