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Conference papers
Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems
Abstract : Micro assembly is typically characterized by
positioning tolerances below a few micrometers. In the case of the
assembly of hybrid micro systems, such as optical systems, micro ball
lenses or micro probes for measurement tasks, even positioning
accuracies in the sub-micrometer range have to be achieved. The
efficiency of the use of automated handling devices is strongly
influenced by the flexibility of the equipment and the required
application specific customizations. In this context a high precision
assembly head is presented. It upgrades conventional robots with the
ability to do fine alignment steps in sub-micrometer resolution and 6
DOF. Therefore it is equipped with a universal endeffector
structure.
Cited literature [4 references]
https://hal.inria.fr/hal-01055690
Contributor : Hal Ifip <>
Submitted on : Wednesday, August 13, 2014 - 11:50:46 AM
Last modification on : Tuesday, June 16, 2020 - 3:26:02 PM
Long-term archiving on: : Thursday, November 27, 2014 - 12:26:21 AM
Contributor : Hal Ifip <>
Submitted on : Wednesday, August 13, 2014 - 11:50:46 AM
Last modification on : Tuesday, June 16, 2020 - 3:26:02 PM
Long-term archiving on: : Thursday, November 27, 2014 - 12:26:21 AM
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Paper_4_-_FREUNDT.pdf
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Distributed under a Creative Commons Attribution 4.0 International License