Skip to Main content Skip to Navigation
Conference papers

Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems

Abstract : Micro assembly is typically characterized by positioning tolerances below a few micrometers. In the case of the assembly of hybrid micro systems, such as optical systems, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. The efficiency of the use of automated handling devices is strongly influenced by the flexibility of the equipment and the required application specific customizations. In this context a high precision assembly head is presented. It upgrades conventional robots with the ability to do fine alignment steps in sub-micrometer resolution and 6 DOF. Therefore it is equipped with a universal endeffector structure.
Document type :
Conference papers
Complete list of metadata

Cited literature [4 references]  Display  Hide  Download
Contributor : Hal Ifip Connect in order to contact the contributor
Submitted on : Wednesday, August 13, 2014 - 11:50:46 AM
Last modification on : Tuesday, October 19, 2021 - 12:49:45 PM
Long-term archiving on: : Thursday, November 27, 2014 - 12:26:21 AM


Files produced by the author(s)


Distributed under a Creative Commons Attribution 4.0 International License



Christian Brecher, Martin Freundt, Christian Wenzel. Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.151-158, ⟨10.1007/978-3-642-11598-1_17⟩. ⟨hal-01055690⟩



Record views


Files downloads