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Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe
Abstract : The measurement of features from the micro- and
precision manufacturing industries requires low uncertainties and
nano-scale resolution. These are best delivered through ultra precise
co-ordinate measuring machines (CMMs). However, current CMMs are often
restricted by the relatively large and insensitive probes used. This
paper focuses on the assembly challenges of a novel micro- CMM probe.
The probe is comprised of a 70 μm glass sphere, attached to a solid
tungsten-carbide shaft of diameter less than 100 μm, joined to a
piezoelectric flexure structure. The assembly requirements are for
positional accuracy of ±0.5 μm, angle between the shaft and flexure of
90°± 0.29° and that the components be undamaged by the process. A
combined Focused Ion Beam and Scanning Electron Microscope machine
(FIB/SEM) with integrated nanoresolution manipulators was used. The
investigation has evaluated potential assembly and joining solutions,
identified modifications to existing equipment and product design and
produced a set of prototypes.
Cited literature [8 references]
https://hal.inria.fr/hal-01055695
Contributor : Hal Ifip <>
Submitted on : Wednesday, August 13, 2014 - 11:46:40 AM
Last modification on : Tuesday, August 8, 2017 - 5:09:24 PM
Long-term archiving on: : Thursday, November 27, 2014 - 12:27:08 AM
Contributor : Hal Ifip <>
Submitted on : Wednesday, August 13, 2014 - 11:46:40 AM
Last modification on : Tuesday, August 8, 2017 - 5:09:24 PM
Long-term archiving on: : Thursday, November 27, 2014 - 12:27:08 AM
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Paper_39_-_SMALE.pdf
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