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Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

Abstract : The measurement of features from the micro- and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro- CMM probe. The probe is comprised of a 70 μm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 μm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ±0.5 μm, angle between the shaft and flexure of 90°± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.
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Daniel Smale, Steve Haley, Joel Segal, Ronaldo Ronaldo, Svetan Ratchev, et al.. Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.105-112, ⟨10.1007/978-3-642-11598-1_12⟩. ⟨hal-01055695⟩

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