Abstract : The measurement of features from the micro- and
precision manufacturing industries requires low uncertainties and
nano-scale resolution. These are best delivered through ultra precise
co-ordinate measuring machines (CMMs). However, current CMMs are often
restricted by the relatively large and insensitive probes used. This
paper focuses on the assembly challenges of a novel micro- CMM probe.
The probe is comprised of a 70 μm glass sphere, attached to a solid
tungsten-carbide shaft of diameter less than 100 μm, joined to a
piezoelectric flexure structure. The assembly requirements are for
positional accuracy of ±0.5 μm, angle between the shaft and flexure of
90°± 0.29° and that the components be undamaged by the process. A
combined Focused Ion Beam and Scanning Electron Microscope machine
(FIB/SEM) with integrated nanoresolution manipulators was used. The
investigation has evaluated potential assembly and joining solutions,
identified modifications to existing equipment and product design and
produced a set of prototypes.
Svetan Ratchev. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. Springer, IFIP Advances in Information and Communication Technology, AICT-315, pp.105-112, 2010, Precision Assembly Technologies and Systems. 〈10.1007/978-3-642-11598-1_12〉
https://hal.inria.fr/hal-01055695
Contributeur : Hal Ifip
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Soumis le : mercredi 13 août 2014 - 11:46:40
Dernière modification le : mardi 8 août 2017 - 17:09:24
Document(s) archivé(s) le : jeudi 27 novembre 2014 - 00:27:08
Daniel Smale, Steve Haley, Joel Segal, Ronaldo Ronaldo, Svetan Ratchev, et al.. Utilisation of FIB/SEM Technology in the
Assembly of an Innovative Micro-CMM Probe. Svetan Ratchev. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. Springer, IFIP Advances in Information and Communication Technology, AICT-315, pp.105-112, 2010, Precision Assembly Technologies and Systems. 〈10.1007/978-3-642-11598-1_12〉. 〈hal-01055695〉
