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Identification of electrostatically actuated mems models from real measurement data

Céline Casenave 1 Emmanuel Montseny 2 Henri Camon 3
1 LAAS-MRS
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-DISCO - Équipe DIagnostic, Supervision et COnduite
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This paper focuses on the identification of nonlinear dynamic models for physical systems such as Micro-Electro-Mechanical Systems (MEMS) from measurement data. The proposed approach consists in transforming, by means of suitable global operations, the specific input-output differential physical model of the system elaborated from physical analysis, in such a way that we get a new equivalent model formulation specifically adapted to the identification problem. Thanks to the equivalence of the dynamic model and the derived identification problem, the so-identified model remains of continuous-time type, with a clear physical meaning of any of its components, which is not the case when using, for example, black-boxes approaches. The method is implemented on real measurement data from a physical system.
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Céline Casenave, Emmanuel Montseny, Henri Camon. Identification of electrostatically actuated mems models from real measurement data. 15th IFAC Symposium on System Identification, SYSID 2009, Jul 2009, Saint-Malo, France. pp.1738-1743, ⟨10.3182/20090706-3-FR-2004.00289⟩. ⟨hal-01061510⟩

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