Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process

Le Cui 1 Eric Marchand 1
1 Lagadic - Visual servoing in robotics, computer vision, and augmented reality
CRISAM - Inria Sophia Antipolis - Méditerranée , Inria Rennes – Bretagne Atlantique , IRISA-D5 - SIGNAUX ET IMAGES NUMÉRIQUES, ROBOTIQUE
Abstract : A scanning electron microscope (SEM) calibrating approach based on non-linear minimization procedure is presented in this article 1. Both the intrinsic parameters and the extrinsic parameters estimations are achieved simultaneously by minimizing the registration error. The proposed approach considers multi-images of a multi-scale calibration pattern view from different positions and orientations. Since the projection geometry of the scanning electron microscope is different from that of a classical optical sensor, the perspective projection model and the parallel projection model are considered and compared with distortion models.
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International Journal of Optomechatronics, Taylor & Francis, 2015, 9 (2), pp.151-169. 〈10.1080/15599612.2015.1034903〉
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Le Cui, Eric Marchand. Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process. International Journal of Optomechatronics, Taylor & Francis, 2015, 9 (2), pp.151-169. 〈10.1080/15599612.2015.1034903〉. 〈hal-01241405〉

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