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Closed-Loop Autofocus Scheme for Scanning Electron Microscope

Abstract : In this paper, we present a full scale autofocus approach for scanning electron microscope (SEM). The optimal focus (in-focus) position of the microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been designed using the sharpness score derived from image gradient information. The proposed method has been implemented and validated using a tungsten gun SEM at various experimental conditions like varying raster scan speed, magnification at real-time. We demonstrate that the proposed autofocus technique is accurate, robust and fast.
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https://hal.inria.fr/hal-01241470
Contributor : Eric Marchand <>
Submitted on : Thursday, December 10, 2015 - 3:23:09 PM
Last modification on : Friday, January 8, 2021 - 3:41:06 AM
Long-term archiving on: : Friday, March 11, 2016 - 3:54:36 PM

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Le Cui, Naresh Marturi, Eric Marchand, Sounkalo Dembélé, Nadine Piat. Closed-Loop Autofocus Scheme for Scanning Electron Microscope. Int. Symp. of Optomechatronics Technology, ISOT 2015, Oct 2015, Neuchatel, Switzerland. ⟨10.1051/matecconf/20153205003⟩. ⟨hal-01241470⟩

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