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Three-Dimensional Visual Tracking and Pose Estimation in Scanning Electron Microscopes

Le Cui 1 Eric Marchand 1 Sinan Haliyo 2 Stéphane Régnier 2
1 Lagadic - Visual servoing in robotics, computer vision, and augmented reality
CRISAM - Inria Sophia Antipolis - Méditerranée , Inria Rennes – Bretagne Atlantique , IRISA-D5 - SIGNAUX ET IMAGES NUMÉRIQUES, ROBOTIQUE
Abstract : Visual tracking and estimation of the 3D posture of a micro/nano-object is a key issue in the development of automated manipulation tasks using the visual feedback. The 3D posture of the micro-object is estimated based on a template matching algorithm. Nevertheless, a key challenge for visual tracking in a scanning electron microscope (SEM) is the difficulty to observe the motion along the depth direction. In this paper, we propose a template-based hybrid visual tracking scheme that uses luminance information to estimate the object displacement on x-y plane and uses defocus information to es- timate object depth. This approach is experimentally validated on 4-DoF motion of a sample in a SEM.
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Submitted on : Tuesday, August 23, 2016 - 2:09:10 PM
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Le Cui, Eric Marchand, Sinan Haliyo, Stéphane Régnier. Three-Dimensional Visual Tracking and Pose Estimation in Scanning Electron Microscopes. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems, IROS'16, Oct 2016, Daejeon, South Korea. pp.5210-5215. ⟨hal-01355393⟩

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