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Simulation-Based ‘Smart’ Operation Management System for Semiconductor Manufacturing
Abstract : Presented in this paper is a framework of a simulation-based ‘smart’ operation management system (OMS) for semiconductor manufacturing. Also described are changes in the semiconductor market environment and key modules in the smart OMS. The proposed smart OMS is being implemented for a couple of IC chip makers in Korea.
Cited literature [7 references]
https://hal.inria.fr/hal-01431081
Contributor : Hal Ifip <>
Submitted on : Tuesday, January 10, 2017 - 3:20:24 PM
Last modification on : Thursday, March 5, 2020 - 4:44:48 PM
Long-term archiving on: : Tuesday, April 11, 2017 - 3:44:19 PM
Contributor : Hal Ifip <>
Submitted on : Tuesday, January 10, 2017 - 3:20:24 PM
Last modification on : Thursday, March 5, 2020 - 4:44:48 PM
Long-term archiving on: : Tuesday, April 11, 2017 - 3:44:19 PM
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346973_1_En_10_Chapter.pdf
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Distributed under a Creative Commons Attribution 4.0 International License