An integrated CMOS micromechanical resonator high-Q oscillator, IEEE Journal of Solid-State Circuits, vol.34, issue.4, pp.440-455, 1999. ,
DOI : 10.1109/4.753677
Electromechanical Analysis Of a Micromahicned Comb-Drive Actuator by Admittance Measurement, IEEJ Trans. SM, vol.126, issue.7, pp.282-285, 2006. ,
A proposal of gyroscope sensor using asymmetrical comb drive actuator " SICE Annual Conference, pp.2935-2939, 2007. ,
Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection, IEEJ Transactions on Sensors and Micromachines, vol.130, issue.9, p.160, 2009. ,
DOI : 10.1541/ieejsmas.130.443
Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.20-23, 2011. ,
DOI : 10.1109/NEMS.2011.6017582
A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope, Journal of Microelectromechanical Systems, vol.17, issue.6, pp.1418-1429, 2008. ,
DOI : 10.1109/JMEMS.2008.2007274