Ultrasonic M achining Technology, 2005. ,
Press Ultrasonic Elliptical Vibration Cutting, Aeronautical M anufacturing Technology, vol.4, pp.92-93, 2005. ,
Study on Elliptical Vibration Cutting, CIRP Annals - Manufacturing Technology, vol.43, issue.1, pp.35-36, 1994. ,
DOI : 10.1016/S0007-8506(07)62158-1
Analysis and Simulation of M echanism in Ultrasonic-Vibration Cutting Based on Dynamic Fracture M echanics, Journal of Harbin Institute of Technology, vol.40, issue.9, pp.1400-1401, 2008. ,
Analysis of Kinematic Geometry on Face Grinding Process on Lapping M achines, M echanical Engineering, vol.38, issue.6, pp.144-146, 2002. ,
Computer Simulation Technology for Precision Lapping Process of Workpiece, Computer Simulation, vol.24, issue.5, pp.249-250, 2007. ,
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process, Applied Surface Science, vol.255, issue.7, pp.4205-4211, 2009. ,
DOI : 10.1016/j.apsusc.2008.11.009
Ultrasonic Transducer Principle and Design, Beijin, 2004. ,
Linear Ultrasonic M otor with Two Degree of Freedom Using Longitudinal and Bending Vibration M odes. M axon M otor, pp.18-19, 2005. ,