J. Nduhura-munga, G. Rodriguez-verjan, S. Dauzere-peres, C. Yugma, P. Vialletelle et al., A literature review on sampling techniques in semiconductor manufacturing, IEEE Transactions on Semiconductor Manufacturing, vol.26, issue.2, pp.188-195, 2013.

D. Gudmundsson and J. G. Shanthikumar, Improving the deployment of inspection tools; tutorial on inspection capacity and sample planning, Semiconductor Manufacturing, pp.410-4132005, 2005.

D. Gudmundsson, Inspection and metrology capacity allocation in the full production and ramp phases of semiconductor manufacturing, 2005.

C. Chien, S. Hsu, S. Peng, and C. Wu, A cost-based heuristic for statistically determining sampling frequency in a wafer fab, Semiconductor Manufacturing Technology Workshop, pp.217-2292000, 2000.

C. Chien and C. Hsu, UNISON analysis to model and reduce step-and-scan overlay errors for semiconductor manufacturing, Journal of Intelligent Manufacturing, vol.22, issue.3, pp.399-412, 2011.

A. A. Khan, J. R. Moyne, and D. M. Tilbury, An approach for factory-wide control utilizing virtual metrology, IEEE Transactions on semiconductor Manufacturing, vol.20, issue.4, pp.364-375, 2007.

C. Chien, H. Wang, and M. Wang, A UNISON framework for analyzing alternative strategies of IC final testing for enhancing overall operational effectiveness, International Journal of Production Economics, vol.107, issue.1, pp.20-30, 2007.

F. Sainfort, Eualuation of Medical Technologies: A Generalized ROC Analysis, Medical Decision Making, vol.11, issue.3, pp.208-220, 1991.