A literature review on sampling techniques in semiconductor manufacturing, IEEE Transactions on Semiconductor Manufacturing, vol.26, issue.2, pp.188-195, 2013. ,
Improving the deployment of inspection tools; tutorial on inspection capacity and sample planning, Semiconductor Manufacturing, pp.410-4132005, 2005. ,
Inspection and metrology capacity allocation in the full production and ramp phases of semiconductor manufacturing, 2005. ,
A cost-based heuristic for statistically determining sampling frequency in a wafer fab, Semiconductor Manufacturing Technology Workshop, pp.217-2292000, 2000. ,
UNISON analysis to model and reduce step-and-scan overlay errors for semiconductor manufacturing, Journal of Intelligent Manufacturing, vol.22, issue.3, pp.399-412, 2011. ,
An approach for factory-wide control utilizing virtual metrology, IEEE Transactions on semiconductor Manufacturing, vol.20, issue.4, pp.364-375, 2007. ,
A UNISON framework for analyzing alternative strategies of IC final testing for enhancing overall operational effectiveness, International Journal of Production Economics, vol.107, issue.1, pp.20-30, 2007. ,
Eualuation of Medical Technologies: A Generalized ROC Analysis, Medical Decision Making, vol.11, issue.3, pp.208-220, 1991. ,