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A non linear diffusion problem arising in semiconductor process modelling with a singularity

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https://hal.inria.fr/inria-00076384
Contributor : Rapport de Recherche Inria <>
Submitted on : Wednesday, May 24, 2006 - 8:45:51 PM
Last modification on : Thursday, February 11, 2021 - 2:50:07 PM
Long-term archiving on: : Friday, May 13, 2011 - 8:09:16 PM

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  • HAL Id : inria-00076384, version 1

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E. Fernandez Cara. A non linear diffusion problem arising in semiconductor process modelling with a singularity. RR-0174, INRIA. 1982. ⟨inria-00076384⟩

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