, Private communication with C.Z. Antoine. unpublished, 2018.

C. Antoine, Materials and surface aspects in the development of SRF Niobium cavities, 2012.

S. Lee, World scientific publishing, 2018.

F. Hinterberger, Electrostatic accelerators, 2006.

J. Kockum and . Starfelt, The response to high-energy gamma rays of a NaI (Tl) scintillation spectrometer, Nuclear Instruments and Methods, vol.4, pp.171-180, 1959.

D. Kostin, Superconducting accelerating module tests at DESY, Proceedings of SRF2009, 2009.

M. Aicheler, A Multi-TeV linear collider based on CLIC technology, CLIC Conceptual Design Report. Tech. rep. SLAC National Accelerator Lab, 2014.

N. Phinney, N. Toge, and N. Walker, ILC reference design report, vol.3, 2007.

J. Biarrotte, High power proton/deuteron accelerators, 16th International Conference on RF Superconductivity (SRF2013), 2013.
URL : https://hal.archives-ouvertes.fr/in2p3-00868923

H. Lengeler, RF superconductivity for high energy accelerators, 1986.

P. Jo, N. Turneaure, and . Viet, SUPERCONDUCTING Nb TM010 MODE ELECTRON-BEAM WELDED CAVITIES". In: Applied Physics Letters, vol.16, pp.333-335, 1970.

. Jk-sekutowicz, Superconducting elliptical cavities, 2012.

D. Rice and D. Rubin, 1.1 Colliding Beams at the Cornell Electron Storage Ring CESR
URL : https://hal.archives-ouvertes.fr/hal-00750251

J. Auerhammer, The S-DALINAC facility-Operational experience from the accelerator and the experimental installations, Nuclear Physics A, vol.553, pp.841-844, 1993.

G. Bisoffi, ALPI QWR and S-RFQ operating experience, Proceedings of the 13th Workshop on RF Superconductivity, 2007.

J. Feldhaus, FLASH-the first soft x-ray free electron laser (FEL) user facility, Journal of Physics B: Atomic, Molecular and Optical Physics, vol.43, p.194002, 2010.

. Re-laxdal and . Baartman, Design Optimization of the proposed ISAC-2 Project at TRIUMF, Proceedings of the 1999 Particle Accelerator Conference (Cat. No. 99CH36366), vol.5, pp.3537-3539, 1999.

E. Kugler, The ISOLDE facility, Hyperfine interactions, vol.129, pp.23-42, 2000.

. Marion-m-white and . Project, Spallation neutron source (SNS), AIP Conference Proceedings, vol.613, pp.15-24, 2002.

P. Azzi, Standard Model Physics at the HL-LHC and HE-LHC, 2019.
URL : https://hal.archives-ouvertes.fr/hal-02051609

S. Acharya, ?c+ production in Pb-Pb collisions at sNN= 5, p.2

. Tev, Physics Letters B, vol.793, pp.212-223, 2019.

A. Navarro, First measurements of radiative B decays in LHCb, 2012.

C. L. Smith, Genesis of the Large Hadron Collider". In: Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.373, p.20140037, 2015.

G. Apollinari, High-luminosity large hadron collider (HL-LHC): Preliminary design report, rep. Fermi National Accelerator Lab.(FNAL), 2015.

E. Chiaveri, The CERN Nb/Cu Programme for the LHC and Reduced-b Superconducting Cavities, 1999.

H. M. Mcglone, Neural network analysis in Higgs search using ttH, H bband tag database development for ATLAS, 2009.

D. Lincoln, The Large Hadron Collider: the extraordinary story of the Higgs Boson and other stuff that will blow your mind, 2014.

D. Nölle, The Diagnostic System at the European XFEL; Commissioning and First User Operation, 7\textsuperscript {th} Int. Beam Instrumentation Conf.(IBIC'18), pp.162-168, 2018.

H. Weise and W. Decking, Commissioning and first lasing of the European XFEL, Proc. FEL'17, 2018.

M. Altarelli, R. Brinkmann, and M. Chergui, The European X-ray free-electron laser. technical design report, 2007.

S. Aderhold, Study of field-limiting defects in superconducting RF cavities for electron-accelerators, Tech. rep. Verlag Deutsches Elektronen-Synchrotron, 2015.

. Fcc,

. Lcls-2,

. Frib,

. Ess,

L. Liu, A. Neuenschwander, and . Rodrigues, Synchrotron radiation sources in Brazil, Philosophical Transactions of the Royal Society A, vol.377, p.20180235, 2019.

M. Benedikt and F. Zimmermann, Status of the future circular collider study, 2016.

R. Calaga, SRF for future circular colliders, 2015.

M. Benedikt and F. Zimmermann, FCC: colliders at the energy frontier, 9th Int. Particle Accelerator Conf.(IPAC'18), pp.2908-2913, 2018.

M. Wenskat, Automated surface classification of SRF cavities for the investigation of the influence of surface properties onto the operational performance, 2015.

T. Behnke, Executive Summary". In: arXiv preprint, vol.1, 2013.

M. Weiss, Introduction to RF linear accelerators, 1994.

F. Gerigk, Cavity types, 2011.

A. Facco, Low and medium beta SC cavities, Proc. EPAC, 2004.

S. Belomestnykh and V. Shemelin, High-beta Cavity Design-A Tutorial, SRF International Workshop, 2005.

R. Kleindienst, Radio frequency characterization of superconductors for particle accelerators, 2018.

. Pe-bernaudin, Design of the low-beta, quarter-wave resonator and its cryomodule for the SPIRAL2 project, In: EPAC, vol.6, p.1276, 2004.

T. Junquera, Design of a Superconducting 352MHz fully jacketed doublespoke resonator for the ESS-Bilbao proton linac, 2013.

B. Aune, Superconducting TESLA cavities, Physical Review Special Topics-Accelerators and Beams, vol.3, p.92001, 2000.
URL : https://hal.archives-ouvertes.fr/in2p3-00012151

H. Kamerlingh and O. , The disappearance of the resistivity of mercury, Comm. Leiden, vol.122, p.2, 1911.

W. Meissner and R. Ochsenfeld, A new effect concerning the onset of superconductivity, Die Naturwissenschaften, vol.21, p.787, 1933.

. W-farrell-edwards, Classical derivation of the London equations, Physical Review Letters, vol.47, p.1863, 1981.

H. Suhl, Ginsburg-Landau theory of two antagonistic order parameters: Magnetism and superconductivity, Journal of the Less Common Metals, vol.62, pp.225-244, 1978.

. Philip-w-anderson, Theory of dirty superconductors, Journal of Physics and Chemistry of Solids, vol.11, issue.1-2, pp.26-30, 1959.

B. David-josephson, Possible new effects in superconductive tunnelling, Physics letters, vol.1, pp.251-253, 1962.

H. Lee, K. Kim, and J. Lee, Review of maglev train technologies, IEEE transactions on magnetics, vol.42, pp.1917-1925, 2006.

O. H-kamerlingh, The resistance of pure mercury at helium temperatures, Commun. Phys. Lab. Univ. Leiden, p.120, 1911.

P. J. Ray, Own work CC BY-SA 4.0. title

J. Peter, G. Ford, and . Saunders, The rise of the superconductors, 2004.

P. Schmüser, Superconductivity, 2004.

K. Bennemann, . John-b-ketterson, and . Superconductivity, Conventional and Unconventional Superconductors, vol.1, 2008.

J. Biarrotte, Etude de cavités supraconductrices pour les accélérateurs de protons de forte puissance, 2000.

. Vl-ginzburg and . Landau, Phenomenological theory, J. Exp. Theor. Phys. USSR, vol.20, p.1064, 1950.

R. David and . Tilley, Superfluidity and superconductivity. Routledge, 2018.

. Hasan-padamsee, RF Superconductivity: Science, Technology and Applications (v. 2), 2009.

J. Hasan-padamsee, T. Knobloch, and . Hays, RF superconductivity for accelerators, 2008.

J. Bardeen, .. &. Ln-cooper, and J. R. Schrieffer, Phys. Rev, vol.108, p.5, 1957.

P. Townsend and . Sutton, Investigation by electron tunneling of the superconducting energy gaps in nb, ta, sn, and pb, Physical Review, vol.128, p.591, 1962.

. Jp-turneaure, H. A. Halbritter, and . Schwettman, The surface impedance of superconductors and normal conductors: The Mattis-Bardeen theory, Journal of Superconductivity, vol.4, pp.341-355, 1991.

T. Stromberg, THE SUPERCONDUCTING PROPERTIES OF HIGH PURITY NIOBIUM (Thesis), 1965.

-. Ben and J. M. Brennan, The quarter wave resonator as a superconducting linac element, Nuclear Instruments and Methods in Physics Research, vol.212, pp.73-79, 1983.

A. Facco and . Zviagintsev, Study on beam steering in intermediate-/spl beta/superconducting quarter wave resonators, PACS2001. Proceedings of the 2001 Particle Accelerator Conference (Cat. No. 01CH37268), vol.2

. Ieee, , pp.1095-1097, 2001.

. Jr-delayen and . Mercereau, Cryogenic test of a superconducting halfwave resonator for the acceleration of heavy ions, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors, vol.257, pp.71-76, 1987.

D. Longuevergne, Course on superconductivity and cryogenics for accelerators, PHENIICS doctoral school, 2016.

K. Hosoyama, Construction and commissioning of KEKB superconducting crab cavities, 2007.

P. Bauer, A comparison of Q-slope models and data in bulk Nb SRF cavities, SRF material meetings, FNAL, 2005.

K. Saito, Basic principles of SRF, SRF 2005 Tutorials, 2005.

P. Yla-oijala, Electron multipacting in TESLA cavities and input couplers, In: Part. Accel, vol.63, pp.105-137, 1999.

T. Higuchi, Hydrogen Q disease and electropolishing, 10th Workshop on RF Superconductivity, 2001.

J. Knobloch and H. Padamsee, Enhanced susceptibility of Nb cavity equator welds to the hydrogen related Q-virus, 8th Workshop on the RF Superconductivity, 1998.

D. Longuevergne, Vertical Test Results of Spoke Resonator at IPNO, TTC Meeting at Saclay, 2016.

A. Grassellino, Pushing bulk Niobium Limits, SRF 2019 Tutorials, 2009.

B. Bonin, Field emission in RF cavities, 1996.

W. Singer, Quality requirements and control of high purity niobium for superconducting RF cavities, Physica C: Superconductivity, vol.386, pp.379-384, 2003.

. S-posen, Nb3Sn at FERMILAB: exploring performance, Proceedings of the 19th International Conference on RF Superconductivity, 2019.

C. Antoine, Materials for superconducting accelerators: beyond bulk Nb, SRF 2019 Tutorials, 2009.

A. Valente-feliciano, Proceedings of the 13th International Conference on RF Superconductivity, Beijing, 2007.

A. Gurevich, Enhancement of rf breakdown field of superconductors by multilayer coating, Applied Physics Letters, vol.88, issue.1, p.12511, 2006.

R. Carter, Applications of Superconducting Technology to Accelerators, vol.5, 2015.

T. Hobson and . Precision's, Exploring Surface Texture: A fundamental guide to the measurement of surface finish, pp.53-62, 2003.

B. Bhushan, Surface roughness analysis and measurement techniques, Modern Tribology Handbook, Two Volume Set, pp.74-144, 2000.

B. Bhushan, Tribology and mechanics of magnetic storage devices, 2012.

N. Mao, Y. Wang, and J. Qu, SMOOTHNESS AND ROUGH-NESS: CHARACTERISTICS OF FABRIC-TO-FABRIC SELF-FRICTION PROPERTIES, The Proceedings of 90th Textile Institute World Conference, 2016.

J. Raja, S. Muralikrishnan, and . Fu, Recent advances in separation of roughness, waviness and form, Precision Engineering, vol.26, pp.222-235, 2002.

S. Tavares, Analysis of surface roughness and models of mechanical contacts, 2005.

Y. Quinsat, L. Sabourin, and C. Lartigue, Surface topography in ball end milling process: description of a 3D surface roughness parameter, Journal of materials processing technology, vol.195, pp.135-143, 2008.
URL : https://hal.archives-ouvertes.fr/hal-01154042

. Es-gadelmawla, Roughness parameters, Journal of materials processing Technology, vol.123, pp.133-145, 2002.

. Dm-shivanna, S. D. Mb-kiran, and . Kavitha, Evaluation of 3D surface roughness parameters of EDM components using vision system, Procedia Materials Science, vol.5, pp.2132-2141, 2014.

L. Blunt and X. Jiang, Advanced techniques for assessment surface topography: development of a basis for 3D surface texture standards" surfstand, 2003.

E. Jansons, K. A. Lungevics, and . Gross, Surface roughness measure that best correlates to ease of sliding, proceedings of the international scientific conference. Latvia University of Agriculture, 2016.

N. Bulaha, Calculations of surface roughness 3D parameters for surfaces with irregular roughness". In: proceedings of the international scientific conference, 2018.

R. Leach, Characterisation of areal surface texture, 2013.

H. Chandler, Hardness testing. ASM international, 1999.

K. Herrmann, Hardness testing: principles and applications, 2011.

G. Barbato, Influence of the indenter shape in Rockwell hardness test, Proc. of the HARDMEKO, vol.98, pp.21-23, 1998.

C. Hays and . Kendall, An analysis of Knoop microhardness, Metallography, vol.6, pp.275-282, 1973.

R. Hill, B. Storåkers, and A. B. Zdunek, A theoretical study of the Brinell hardness test, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences, vol.423, pp.301-330, 1989.

J. Mitchell, Vickers Hardness Test: What it is and how it's measured. Ed. by Engineering clicks, 2017.

J. A. Williams, Analytical models of scratch hardness, Tribology international, vol.29, pp.675-694, 1996.

D. Tabor, Mohs's hardness scale-a physical interpretation, Proceedings of the Physical Society. Section B, vol.67, p.249, 1954.

D. Roylance, Mechanical properties of materials, Massachusetts Institute of Technology, pp.51-78, 2008.

T. Teo, G. Yang, and I. Chen, Compliant Manipulators, pp.1-64, 2014.

H. Jiang, Mechanical properties, microstructure, and texture of electron beam butt welds in high purity Niobium, Proceedings of the 2003 Particle Accelerator Conference, vol.2, pp.1359-1361, 2003.

C. Antoine, N. Foley, and . Dhanaraj, Physical properties of niobium and specifications for fabrication of superconducting cavities, Fermi National Accelerator Lab.(FNAL), 2011.

W. Ronald and . Armstrong, 60 years of Hall-Petch: past to present nano-scale connections, Materials Transactions, vol.55, pp.2-12, 2014.

A. Repula and E. Grelet, Elementary Edge and Screw Dislocations Visualized at the Lattice Periodicity Level in the Smectic Phase of Colloidal Rods, Physical review letters, vol.121, p.97801, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02177013

C. Antoine, Nuclear Microprobe studies of impurities segregation in Niobium used for radiofrequency cavities, Proc. of 8 th SRF Workshop, 1997.

C. Ismail, J. Noyan, and . Cohen, Residual stress: measurement by diffraction and interpretation, 2013.

H. Hilgenkamp and J. Mannhart, Grain boundaries in high-T c superconductors, Reviews of Modern Physics, vol.74, p.485, 2002.

. Rl-geng, H. Knobloch, and . Padamsee, Microstructures of rf surfaces in the electron-beam-weld regions of niobium, pp.238-245, 1999.

A. Romanenko and D. I. Schuster, Understanding quality factor degradation in superconducting niobium cavities at low microwave field amplitudes, Physical review letters, vol.119, p.264801, 2017.

H. Diepers, A new method of electropolishing niobium, Physics Letters A, vol.37, issue.2, pp.139-140, 1971.

F. Eozenou, Niobium Electro-Polishing: Best EP Parameters

K. Saito, Proceedings of the 4th Workshop on RF Superconductivity, 1990.

N. Steinhau-kühl, Update On The Experiences Of Electro-polishing Of Multi-cell Resonators At DESY, 2005.

P. Kneisel, Surface characterization of bulk Nb: what has been done, what has been learnt?, In: Proc. of the 11th Workshop on RF Superconductivity, 2003.

. Jean-r-delayen, Alternate electrolyte composition for electropolishing of niobium surfaces. Tech. rep. Thomas Jefferson National Accelerator Facility, 2001.

S. Jin, Niobium Sample Surface Treatment by Buffered Electropolishing, 2007.

T. Andy and . Wu, Smooth Nb surfaces fabricated by buffered electropolishing, Applied Surface Science, vol.253, pp.3041-3052, 2007.

L. Lilje, Improved surface treatment of the superconducting TESLA cavities, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.516, pp.213-227, 2004.

G. Ciovati, H. Tian, and S. G. Corcoran, Buffered electrochemical polishing of niobium, Journal of Applied Electrochemistry, vol.41, pp.721-730, 2011.

. Lutz-lilje, State of the art SRF cavity performances, Proc. 22nd International Linear Accelerator Conference, p.518, 2004.

. Cz-antoine, Alternative approaches for surface treatment of Nb superconducting cavities, pp.109-117, 1999.

G. Ciovati, S. Corcoran, and J. Halbritter, Buffered Chemical Polishing of a Large Grain Niobium Cavity, Thomas Jefferson National Accelerator Facility, 2008.

F. Goossens, Modélisation du processus de polissage: identification des effets et des phénoménologies induits par l'usinage abrasif, 2015.

D. Ioan, E. Marinescu, T. Uhlmann, and . Doi, Handbook of lapping and polishing, 2006.

L. E. To-mulhearn and . Samuels, The abrasion of metals: a model of the process, Wear 5, vol.6, pp.478-498, 1962.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.87-88, 2007.

K. Hokkirigawa and . Kato, An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear, Tribology international, vol.21, pp.51-57, 1988.

L. E. Samuels, Metallographic polishing by mechanical methods, 2003.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.3-13, 2007.

G. Voort, Metallography, principles and practice. ASM International, 1999.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.82-84, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.85-87, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, vol.46, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.93-94, 2007.

F. James and . Shackelford, CRC materials science and engineering handbook, 2016.

, Yaw Samuel Obeng. Method of polishing. US Patent, vol.5, p.963, 1998.

J. Robert and . Small, Chemical mechanical polishing composition and process, US Patent, vol.6, p.783, 2000.

S. Sundararajan, Two-Dimensional Wafer-Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport, Journal of the electrochemical society, vol.146, pp.761-766, 1999.

R. J. Walsh, H. Arno, and . Herzog, Process for polishing semiconductor materials. US Patent and Trademark Office, 1965.

M. Sivanandini, D. Sukhdeep, and B. S. Pabla, Chemical mechanical polishing by colloidal silica slurry, International Journal of Engineering Research and Applications (IJERA) ISSN, vol.6, pp.2248-9622, 2013.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.1-12, 2007.

D. Zhao and X. Lu, Chemical mechanical polishing: theory and experiment, In: Friction, vol.1, pp.306-326, 2013.

T. Higuchi, Investigation on barrel polishing for superconducting niobium cavity, Proc. 7th SRF Int. Workshop, DIST CEA, 1995.

A. Navitski, R&D on cavity treatments at DESY towards the ILC performance goal, 2013.

A. Navitski, Surface analyses and optimization of centrifugal barrel polishing of Nb cavities, 2015.

A. Prudnikava, R&D Activities on centrifugal barrel polishing of 1.3 GHz niobium cavities at DESY/University of hamburg, Proc. Int

C. Supercond, , 2017.

A. Palczewski, R&D progress in SRF surface preparation with centrifugal barrel polishing (CBP) for both Nb and Cu. Tech. rep. Thomas Jefferson National Accelerator Facility, 2013.

A. Palczewski, R. Geng, and H. Tian, Optimizing Centrifugal barrel polishing for mirror finish SRF Cavity and RF Tests at Jefferson Lab

. Tech and . Rep, Thomas Jefferson National Accelerator Facility, 2012.

A. Palczewski, Exploration of material removal rate of srf elliptical cavities as a function of media type and cavity shape on niobium and copper using centrifugal barrel polishing (cbp). Tech. rep. Thomas Jefferson National Accelerator Facility, 2013.

C. Cooper, Cavity processing research laboratory at Fermilab: SRF cavity processing R&D, Proceedings of SRF, 2011.

C. Cooper, Centrifugal barrel polishing of cavities worldwide, Proceedings of SRF, pp.571-575, 2011.

C. Cooper, Recent developments in electropolishing and tumbling\& at Fermilab, Presented at

C. A. Cooper and . Cooley, Mirror smooth superconducting rf cavities by mechanical polishing with minimal acid use, 2011.

C. A. Cooper and . Cooley, Mirror-smooth surfaces and repair of defects in superconducting RF cavities by mechanical polishing, Superconductor Science and Technology, vol.26, p.15011, 2012.

S. Posen, M. Liepe, and D. Gonnella, Recent progress in Nb3Sn SRF cavity development at Cornell, 2014.

P. Khare, New Technique and Results of Laser Welded SCRF Cavity Developed at RRCAT, 16th International Conference on RF Superconductivity(SRF2013), pp.23-27, 2013.

T. Higuchi, S. Saito, and . Noguchi, Application of centrifugal barrel polishing to a niobium superconducting cavity, 2001.

D. Ari and . Palczewski, Detailed surface analysis of incremental centrifugal barrel polishing (CBP) of single-crystal niobium samples. Tech. rep. Thomas Jefferson National Accelerator Facility, 2011.

A. David and . Davidson, Mass finishing processes, Metal finishing, vol.100, pp.104-117, 2002.

S. Gregory and . Kirkendall, Light weight ceramic abrasive media, US Patent, vol.5, p.603, 1995.

E. Uhlmann, A. Dethlefs, and A. Eulitz, Investigation of material removal and surface topography formation in vibratory finishing, Procedia CIRP, vol.14, pp.25-30, 2014.

J. Hildebrand, Laser beam polishing of quartz glass surfaces, Physics Procedia, vol.12, pp.452-461, 2011.

F. Laguarta and . Lupon, Optical glass polishing by controlled laser surface-heat treatment, Applied optics, vol.33, pp.6508-6513, 1994.

A. Lamikiz, Laser polishing of parts built up by selective laser sintering, International Journal of Machine Tools and Manufacture, vol.47, pp.2040-2050, 2007.

. Sm-pimenov, Laser polishing of diamond plates, Applied Physics A, vol.69, issue.1, pp.81-88, 1999.

J. A. Ramos, Surface roughness enhancement of indirect-SLS metal parts by laser surface polishing, Solid Freeform Fabrication Proceedings, pp.28-38, 2001.

H. Mircea-v-udrea, A. Orun, and . Alacakir, Laser polishing of optical fiber end surface, Optical Engineering, vol.40, pp.2026-2031, 2001.

K. Alrbaey, On optimization of surface roughness of selective laser melted stainless steel parts: A statistical study, Journal of Materials Engineering and Performance, vol.23, pp.2139-2148, 2014.

. Sl-campanelli, Taguchi optimization of the surface finish obtained by laser ablation on selective laser molten steel parts, Procedia CIRP, vol.12, pp.462-467, 2013.

B. Rosa, P. Mognol, and J. Hascoët, Modelling and optimization of laser polishing of additive laser manufacturing surfaces, Rapid Prototyping Journal, vol.22, pp.956-964, 2016.

E. Ukar, Laser polishing parameter optimization for die and moulds surface finishing, ASME 2008 International Manufacturing Science and Engineering Conference collocated with the 3rd JSME/ASME International Conference on Materials and Processing, pp.197-204, 2008.

E. Ukar, Laser polishing parameter optimisation on selective laser sintered parts, International Journal of Machining and Machinability of Materials, vol.8, pp.417-432, 2010.

C. Weingarten, Laser polishing and laser shape correction of optical glass, Journal of Laser Applications, vol.29, p.11702, 2017.

B. Rosa, P. Mognol, and J. Hascoët, Laser polishing of additive laser manufacturing surfaces, Journal of Laser Applications, vol.27, p.29102, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01149709

A. Temmler, K. Willenborg, and . Wissenbach, Laser polishing, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM)

. Xvii, International Society for Optics and Photonics, vol.8243, p.82430, 2012.

L. Zhao, Laser polishing of niobium for SRF applications, 2013.

. Vitali-porshyn, Laser treatment of niobium surfaces for SRF applications, Journal of Physics: Conference Series, vol.1067, p.82011, 2018.

L. Zhao, Parameter Optimization for Laser Polishing of Niobium for SRF Applications, 2013.

. Rg-poulsen, Plasma etching in integrated circuit manufacture-A review, Journal of Vacuum Science and Technology, vol.14, pp.266-274, 1977.

J. H. Greiner, Josephson tunneling barriers by rf sputter etching in an oxygen plasma, Journal of Applied Physics, vol.42, pp.5151-5155, 1971.

M. Gurvitch, Preparation and properties of Nb Josephson junctions with thin Al layers, IEEE Transactions on Magnetics, vol.19, issue.3, pp.791-794, 1983.

A. Shoji, New fabrication process for Josephson tunnel junctions with (niobium nitride, niobium) double-layered electrodes, Applied Physics Letters, vol.41, pp.1097-1099, 1982.

S. Moshkalyov, J. Reyes-betanzo, and . Swart, Anisotropic Etching of Si for Micromachining Applications Using SF6/CH4/O2/Ar Plasma, Proc. of the 16th Brazilian Congress of Mechanical Engineering, pp.19-22

M. Ozgur and M. Huff, High-etch rate processes for performing deep, highly anisotropic etches in silicon carbide using inductively coupled plasma etching, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol.35, p.42003, 2017.

M. Ra?kovi?, Plasma treatment of bulk niobium surface for SRF cavities, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, vol.569, pp.663-670, 2006.

J. Upadhyay, Plasma etching of a single-cell RF cavity-asymmetric electronegative discharge, Proceedings of SRF, 2009.

J. Upadhyay, Plasma Treatment of Niobium SRF Cavity Surfaces, p.239, 2010.

M. Ra?kovi?, Plasma treatment of bulk niobium surface for superconducting rf cavities: Optimization of the experimental conditions on flat samples, Physical Review Special Topics-Accelerators and Beams, vol.13, p.112001, 2010.

J. Upadhyay, Plasma Treatment of Single-Cell Niobium SRF Cavities. Tech. rep. Thomas Jefferson National Accelerator Facility, 2011.

J. Upadhyay, Experiment and Results on Plasma Etching of SRF cavities, 2015.

J. Upadhyay, Etching mechanism of niobium in coaxial Ar/Cl2 radio frequency plasma, Journal of Applied Physics, vol.117, p.113301, 2015.

J. Upadhyay, Cryogenic rf test of the first SRF cavity etched in an rf Ar/Cl2 plasma, AIP Advances 7, vol.12, p.125016, 2017.

J. Peshl, The Effect of Process Parameters on the Surface Properties of Niobium During Plasma Etching, 2018.

. Vn-duradzhi, A. K. Bryantsev, and . Tokarov, Investigation of erosion of the anode under the action of an electrolytic plasma on it, Elektronnaya Obrabotka Materialov, vol.5, pp.15-19, 1979.

A. Mayorov and A. Berkovich, Plasma-electrolytic polishing of metals products. US Patent App. 12/691,773, 2010.

K. Nestler, Plasma Electrolytic Polishing-an Overview of Applied Technologies and Current Challenges to Extend the Polishable Material Range, Procedia CIRP, vol.42, pp.503-507, 2016.

M. Cornelsen, C. Deutsch, and H. Seitz, Electrolytic Plasma Polishing of Pipe Inner Surfaces, Metals 8.1, p.12, 2017.

. Ev-parfenov, Towards smart electrolytic plasma technologies: An overview of methodological approaches to process modelling, Surface and Coatings Technology, vol.269, pp.2-22, 2015.

F. Böttger-hiller, Plasma electrolytic polishing of metalized carbon fibers, AIMS Mater. Sci, vol.3, pp.260-269, 2016.

. Vn-duradji, A. Y. De-kaputkin, and . Duradji, Aluminum Treatment in the Electrolytic Plasma During the Anodic Process, In: Journal of Engineering Science & Technology Review, vol.10, issue.3, 2017.

W. Gui, Electrolytic plasma processing-an innovative treatment for surface modification of 304 stainless steel, Scientific reports, vol.7, p.308, 2017.

. Mk-smyslova, Surface electrolytic-plasma polishing of Ti-6Al-4V alloy with ultrafine-grained structure produced by severe plastic deformation, IOP Conference Series: Materials Science and Engineering, vol.461, p.12079, 2018.

S. Talwinder, A. Bedi, and . Singh, Magnetorheological methods for nanofinishing-a review, Particulate Science and Technology, vol.34, pp.412-422, 2016.

. N-a-mutalib, Magnetorheological finishing on metal surface: A review, IOP Conference Series: Materials Science and Engineering, vol.469, p.12092, 2019.

. Vk-jain, Nano-finishing techniques: a review, Proceedings of the Institution of Mechanical Engineers, vol.226, pp.327-346, 2012.

H. Du, C. Song, and S. Li, Study on Surface Roughness of Modified Silicon Carbide Mirrors polished by Magnetorheological Finishing, IOP Conference Series: Materials Science and Engineering, vol.301, p.12164, 2018.

M. Sutowska and . Pawe-l-sutowski, Contemporary applications of magnetoreological fluids for finishing process, Journal of Mechanical and Energy Engineering, vol.1, 2017.

I. Wm, S. D. Kordonski, and . Jacobs, Magnetorheological finishing". In: International Journal of modern physics B, vol.10, pp.2837-2848, 1996.

J. Neauport, Magnetorheological finishing for removing surface and subsurface defects of fused silica optics Magnetorheological finishing for removing surface and subsurface defects of fused silica optics, Optical Engineering, vol.53, p.92010, 2014.
URL : https://hal.archives-ouvertes.fr/cea-01692792

. Lamplan,

. Abc-swisstech,

H. Edward and . Tulinski, Mass finishing, ASM International, Member/Customer, pp.118-125, 1994.

Y. Tamashevich, Diagnostics and treatment of 1.3 GHz Nb cavities, 2016.

F. Barkov, Precipitation of hydrides in high purity niobium after different treatments, Journal of Applied Physics, vol.114, p.164904, 2013.

. Flir,

M. Marvin, Microscopy apparatus. US Patent 3,013, p.467, 1961.

W. Zinth, A. Laubereau, and W. Kaiser, The long journey to the laser and its rapid development after, The European Physical Journal H, vol.36, issue.2, pp.153-181, 1960.

T. Wilson, Confocal microscopy, vol.426, 1990.

J. Kirk, T. Czymmek, and . Dahms, Future Directions in Advanced Mycological Microscopy, pp.143-162, 2015.

M. Yu, Chemical enhancement effects in SIMS analysis, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol.15, pp.151-158, 1986.

R. Behrisch, Sputtering by particle bombardment I". In: Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids, 1981.

, Mass spectrometers for vacuum, gas, plasma and surface science

. Me-fitzpatrick, Determination of residual stresses by X-ray diffraction, 2005.

S. Nishikawa and S. Kikuchi, Diffraction of cathode rays by calcite, Nature, vol.122, p.726, 1928.

J. A. Venables and . Harland, Electron back-scattering patterns-A new technique for obtaining crystallographic information in the scanning electron microscope, Philosophical Magazine, vol.27, pp.1193-1200, 1973.

J. Perret, EBSD, SEM and FIB characterisation of subsurface deformation during tribocorrosion of stainless steel in sulphuric acid, Wear 269, pp.383-393, 2010.

L. Zhong, J. Wang, and . Lee, Electron microscopy techniques for imaging and analysis of nanoparticles, Developments in Surface Contamination and Cleaning, pp.531-584, 2008.

, Scanning Electron Microscopes (SEM)

A. Prudnikava, Toward Optimization of Centrifugal Barrel Polishing Procedure for Treatment of Niobium Cavities, IEEE Transactions on Applied Superconductivity, vol.28, pp.1-5, 2018.

C. Baumier, Multilayers Activities at Saclay/Orsay, 2013.
URL : https://hal.archives-ouvertes.fr/in2p3-00868927

C. Z. Antoine and . Crooks, Reducing Electropolishing Time with Chemical-Mechanical Polishing, Proc. 14th Int. Conf. on RF Superconductivity, 2009.

W. Singer, Seamless/bonded niobium cavities, Physica C: Superconductivity 441, vol.1, pp.89-94, 2006.

E. Cantergiani, First Results of Superconducting RF (SRF) Cavity Fabrication by Electrohydraulic Forming, 2018.

O. Hryhorenko, Metallographic Polishing Pathway to the Future of Large Scale SRF Facilities, 19th Int. Conf. on RF Superconductivity (SRF'19), pp.828-832, 2019.

G. Martinet, Development of a te011 cavity for thin-films study, 2010.

P. Welander, M. Franzi, and S. Tantawi, Cryogenic RF characterization of superconducting materials at SLAC with hemispherical cavities, 2015.

J. Guo, Cryogenic RF material testing at SLAC, Conf. Proc. C110328, pp.1030-1032, 2011.

S. Atieh, First results of SRF cavity fabrication by electro-hydraulic forming at CERN, 2015.

M. Rîp?, Tribological characterisation of surface topography using Abbott-Firestone curve, Annals of University Dun?rea de Jos of Galati, Fascicle VIII, pp.208-212, 2003.

J. Schmähling and . Hamprecht, Generalizing the Abbott-Firestone curve by two new surface descriptors, Wear 262, pp.1360-1371, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.328-331, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.398-401, 2007.

K. Geels, Metallographic and materialographic specimen preparation, light microscopy, image analysis, and hardness testing, ASTM international West Conshohocken, vol.46, pp.376-379, 2007.