Abstract : Key industries such as the automotive, electronic,
medical and laboratory technical industries have continually rising
demands for precise manufacturing, handling and control techniques. This
is true for the manufacture of injection nozzles for engines as indeed
also for the irradiation of extremely fine wafer structures and in the
field of scanning probe microscopy. Some examples from research and
their industrial application which have been made available by NanoMat
Network Partners will be highlighted in this presentation. For example
the spontaneous structure formation at the nanoscale and the application
as anti-reflection layers.
https://hal.inria.fr/hal-01055681 Contributor : Hal IfipConnect in order to contact the contributor Submitted on : Wednesday, August 13, 2014 - 11:58:50 AM Last modification on : Tuesday, August 8, 2017 - 5:09:06 PM Long-term archiving on: : Thursday, November 27, 2014 - 12:22:36 AM
Regine Hedderich, Tobias Heiler, Roland Gröger, Thomas Schimmel, Stefan Walheim. Positioning, Structuring and Controlling with
Nanoprecision. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.222-226, ⟨10.1007/978-3-642-11598-1_26⟩. ⟨hal-01055681⟩