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Positioning, Structuring and Controlling with Nanoprecision

Abstract : Key industries such as the automotive, electronic, medical and laboratory technical industries have continually rising demands for precise manufacturing, handling and control techniques. This is true for the manufacture of injection nozzles for engines as indeed also for the irradiation of extremely fine wafer structures and in the field of scanning probe microscopy. Some examples from research and their industrial application which have been made available by NanoMat Network Partners will be highlighted in this presentation. For example the spontaneous structure formation at the nanoscale and the application as anti-reflection layers.
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Submitted on : Wednesday, August 13, 2014 - 11:58:50 AM
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Regine Hedderich, Tobias Heiler, Roland Gröger, Thomas Schimmel, Stefan Walheim. Positioning, Structuring and Controlling with Nanoprecision. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.222-226, ⟨10.1007/978-3-642-11598-1_26⟩. ⟨hal-01055681⟩

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