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Simulations numeriques dans la fabrication des circuits a semiconducteurs (Process modelling)

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https://hal.inria.fr/inria-00076252
Contributor : Rapport de Recherche Inria Connect in order to contact the contributor
Submitted on : Wednesday, May 24, 2006 - 8:27:31 PM
Last modification on : Friday, February 4, 2022 - 3:19:35 AM
Long-term archiving on: : Friday, May 13, 2011 - 7:07:46 PM

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  • HAL Id : inria-00076252, version 1

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Americo Marrocco. Simulations numeriques dans la fabrication des circuits a semiconducteurs (Process modelling). [Rapport de recherche] RR-0305, INRIA. 1984. ⟨inria-00076252⟩

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