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Simulations numeriques dans la fabrication des circuits a semiconducteurs (Process modelling)
Résumé : Résumé disponible dans les fichiers attachés
https://hal.inria.fr/inria-00076252
Contributor : Rapport de Recherche Inria Connect in order to contact the contributor
Submitted on : Wednesday, May 24, 2006 - 8:27:31 PM
Last modification on : Friday, February 4, 2022 - 3:19:35 AM
Long-term archiving on: : Friday, May 13, 2011 - 7:07:46 PM
Contributor : Rapport de Recherche Inria Connect in order to contact the contributor
Submitted on : Wednesday, May 24, 2006 - 8:27:31 PM
Last modification on : Friday, February 4, 2022 - 3:19:35 AM
Long-term archiving on: : Friday, May 13, 2011 - 7:07:46 PM