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Submitted on : Wednesday, May 24, 2006 - 8:27:31 PM Last modification on : Thursday, February 11, 2021 - 2:50:07 PM Long-term archiving on: : Friday, May 13, 2011 - 7:07:46 PM
Americo Marrocco. Simulations numeriques dans la fabrication des circuits a semiconducteurs (Process modelling). [Rapport de recherche] RR-0305, INRIA. 1984. ⟨inria-00076252⟩