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Trapping Biological Species in a Lab-on-Chip Microsystem: Micro Inductor Optimization Design and SU8 Process

Abstract : Micro-spiral inductor dedicated to microbeads manipulation in a fluidic channel had been optimized by analytical modelling correlated to multi physics fem numerical Maxwell®3D L software. Main advantage of the analytical model described below is time analysis calculus decrease of and the capability offered to optimize geometrical and electrical parameters of the inductor. First experimental results show a good correlation between simulation and realized integrating micro-devices in a fluidic channel.
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Christophe Escriba, Rémy Fulcrand, Philippe Artillan, David Jugieu, Aurélien Bancaud, et al.. Trapping Biological Species in a Lab-on-Chip Microsystem: Micro Inductor Optimization Design and SU8 Process. 19th IFIP WG 10.5/IEEE International Conference on Very Large Scale Integration (VLSI-SoC), Oct 2008, Rhodes Island, India. pp.81-96, ⟨10.1007/978-3-642-12267-5_5⟩. ⟨hal-01054543v1⟩

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