Derivation of Accurate Tensor Data of Materials in SAW Devices by Solving a Parameter Identification Problem Using an Enhanced Eigenvalue Analysis of an Infinite Array Model

Gerold Grünauer 1, 2 Markus Mayer 2 Matthias Knapp 2 Philipp Jaeger 2 Thomas Ebner 2 Karl Wagner 2 Hans-Josef Pesch
1 Mathematisches Institut [Bayreuth]
2 TDK corporation
Abstract : Accurate simulations of SAW elements require accurate material parameters. However, literature values, usually based on measurements of thick crystals, mostly don’t reflect the properties of thin film layers used within SAW devices with the necessary precision. In this work, a parameter identification procedure is presented, which can determine these material parameters based on measurements of admittance curves of SAW resonators and wave velocities within SAW delay lines. The optimization problem is solved using a surrogate model, where the surrogate models are built up efficiently and reliably using a predictor / corrector technique utilizing several iterative FEM techniques.
Type de document :
Communication dans un congrès
2013 IEEE International Ultrasonics Symposium (IUS), 2013, Prague, Czech Republic. pp.1700-1703, Proceedings of the 2013 IEEE International Ultrasonics Symposium (IUS). 〈10.1109/ULTSYM.2013.0433〉
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https://hal.inria.fr/hal-01101265
Contributeur : Estelle Bouzat <>
Soumis le : jeudi 8 janvier 2015 - 11:28:32
Dernière modification le : vendredi 13 octobre 2017 - 17:08:16

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Gerold Grünauer, Markus Mayer, Matthias Knapp, Philipp Jaeger, Thomas Ebner, et al.. Derivation of Accurate Tensor Data of Materials in SAW Devices by Solving a Parameter Identification Problem Using an Enhanced Eigenvalue Analysis of an Infinite Array Model. 2013 IEEE International Ultrasonics Symposium (IUS), 2013, Prague, Czech Republic. pp.1700-1703, Proceedings of the 2013 IEEE International Ultrasonics Symposium (IUS). 〈10.1109/ULTSYM.2013.0433〉. 〈hal-01101265〉

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